半导体厂漂浮的particle

文摘 2024-11-18 07:39 河南

李四一大半夜地就被值班电话一个电话叫进去了，制造部说是机台的污染测试monitor有问题，让停机检查。

李四一听着电话里焦急的声音也马上起身，把无尘包背上准备进fab了，李四一来到管制口，看了眼时钟，才凌晨一点多，就不安分，摇摇头走了进去。

李四一调了一卡干净的wafer先拿去量测机台测了一下表面的particle数量，不多10个。接着又把wafer拿到自己负责的机台上面去跑了10遍，再进行复测，结果直接爆表，把量测机台卡死了，10几分钟才反应过来把片子退出来。

看来还是机台太脏了，同时李四一看别的部门的也进来了，一问，也是说PWP不好让进来看看，李四一拍了拍同事，又继续往自己的机台那边走。

李四一掏出手店，打到最大档位，一照机台的EFEM里面有很多漂浮的颗粒。李四一赶紧去柜子里把IPA和无尘布拿过来，拿过来的时候又碰见其他部门的设备了，也是说机台里面脏。有这么巧的事？

不管了先把自己机台擦干紧再说。李四一拿着无尘布，折了几折，便开始擦了，反反复复擦了好几遍，无尘布过上一遍，上面就会有很多黑色的小脏东西。李四一感觉擦不干净了，一照，还是很多可见物像幽灵一般在无声地漂浮着。

李四一擦得无尘服都湿了一大片，把头从EFEM里面拿出来，腰也酸酸的。他把手电在无尘室一照，整个无尘室都漂浮着脏东西，看来是无尘室的问题。李四一赶紧打电话给厂务值班的过来看看。

厂务推着测空气颗粒的机器过来测了一下，直接红的爆表，看来整个无尘室有问题了。李四一去仓库拿了一些无尘静电PVC布把机台给罩了起来。便出去了，制造部问李四一机台什么时候能够还，李四一说，可以休息了，无尘室脏了。

后续便是无尘室进行大清洗，一发现原来是天花板的无尘室ULPA质量不过关，往下掉脏东西，再一细查，厂里某个领导的亲戚是做这个的，本来按照标准应该采购高质量的ULPA结果为了贪点钱，用了自己亲戚家劣质的filter，导致出现现在的现象。

所有的工程师都化身半导体厂清洁工，在换了新的filter之后，擦地板，擦机台，擦天车，擦stoker,在一个多月的努力下，无尘室总算回到了标准范围内。

李四一和同事又花了一个多礼拜，对他们部门的机台进行机台的内部ULPA更换。李四一和同事天天在fab里面骂那个贪污腐败的领导，赶紧进监狱吧。

发生了这件事之后，厂领导也报警了，警察还多次来走访调查，那几个贪污的领导也实实在在地被抓了，厂里领导层是大地震，领导被抓了一大半，供应商之类的也抓了一些。

不过除了那些采用劣质ULPA的领导，fab的安装颗粒检测仪肯定也有问题的，应该早就检测出来的，爆表了还显示很干净呢！这不是自欺欺人吗？！

后续厂长让员工那个礼拜再继续提交一些不合理改善意见，采用的话还能奖励300块钱。

李四一每天经过冲身洗眼器，觉得这个可能会有问题，他试着拉了一下，结果没水。李四一往下一看，管子都没接，李四一马上就打电话给安全部门，说是这个有问题。这个确实是生命之源，你们也敢这样做！

安全部门花了半个小时就修好了，接上水管，还进行了测试，排除了隐患，李四一也拿到了300块钱奖金，李四一拿到奖金便去吃了一顿烤肉，结果烤肉也是异常地难吃，评分还5.0呢。都是托吧，白瞎了李四一的奖金了。

Li Siyi was called in by the duty phone in the middle of the night. The manufacturing department said that there was a problem with the pollution test monitor of the machine, and asked to stop the machine for inspection. Li Siyi got up immediately after hearing the anxious voice on the phone, put on the dust-free bag and prepared to enter the fab. Li Siyi came to the control port and looked at the clock. It was just after one o'clock in the morning, and he was restless. He shook his head and walked in. Li Siyi adjusted a clean wafer and took it to the measuring machine to measure the number of particles on the surface. There were no more than 10. Then he took the wafer to the machine he was responsible for and ran it 10 times, and then retested it. The result was directly over the meter, and the measuring machine was stuck. It took more than 10 minutes to react and eject the film. It seems that the machine is too dirty. At the same time, Li Siyi saw that people from other departments also came in. When he asked, they also said that PWP was not good and asked them to come in to take a look. Li Siyi patted his colleagues and continued to walk to his own machine. Li Siyi took out his mobile phone and turned it to the maximum gear. When he shone on the EFEM of the machine, there were many floating particles. Li Siyi hurriedly went to the cabinet to get IPA and dust-free cloth. When he got them, he encountered equipment from other departments. They also said that the machines were dirty. Is it such a coincidence? No matter what, he wiped his machine dry first. Li Siyi took the dust-free cloth, folded it a few times, and began to wipe it. He wiped it over and over again. After the dust-free cloth was used, there would be a lot of small black dirt on it. Li Siyi felt that he couldn't wipe it clean. When he looked at it, there were still many visible objects floating silently like ghosts. Li Siyi wiped a large area of his dust-free suit wet. When he took his head out of the EFEM, his waist was sore. He shone the flashlight in the clean room. The whole clean room was full of floating dirt. It seemed that there was a problem with the clean room. Li Siyi hurriedly called the factory duty to come and have a look. The factory pushed the machine that measured air particles over to measure it. It was red. It seemed that there was a problem with the whole clean room. Li Siyi went to the warehouse to get some dust-free static PVC cloth to cover the machine. Then he left. The manufacturing department asked Li Siyi when the machine could be returned. Li Siyi said that he could take a break because the clean room was dirty. The next step was to clean the clean room. It was discovered that the ULPA of the clean room on the ceiling was not of good quality and dirt was falling down. After a closer look, it was found that a relative of a leader in the factory was doing this. According to the standard, he should have purchased high-quality ULPA, but in order to make a little money, he used the inferior filter of his relative's home, which led to the current situation. All engineers turned into cleaners in the semiconductor factory. After replacing the new filter, they wiped the floor, the machine, the overhead crane, and the stocker. After more than a month of hard work, the clean room finally returned to the standard range. Li Siyi and his colleagues spent more than a week replacing the internal ULPA of the machines in their department. Li Siyi and his colleagues cursed the corrupt leader in the fab every day, saying that he should go to jail quickly. After this incident, the factory leaders also called the police, and the police visited the factory several times for investigation. The corrupt leaders were actually arrested. There was a major earthquake in the factory leadership, and more than half of the leaders were arrested, and some suppliers were also arrested. However, in addition to those leaders who used inferior ULPA, there must be problems with the particle detector installed by fab. It should have been detected long ago. It was off the charts but still showed very clean! Isn't this deceiving yourself? ! The factory manager asked the employees to continue to submit some unreasonable improvement suggestions that week, and if they were adopted, they would be rewarded with 300 yuan. Li Siyi passed by the shower and eyewash every day and thought there might be a problem with it. He tried to pull it, but there was no water. Li Siyi looked down and found that the pipes were not connected. Li Siyi immediately called the safety department and said that there was a problem with it. This is indeed the source of life, and you dare to do this! The security department repaired it in half an hour, connected the water pipe, and conducted tests to eliminate the hidden dangers. Li Siyi also received a bonus of 300 yuan. After receiving the bonus, Li Siyi went to eat a barbecue, but the barbecue was also extremely unpalatable, and the score was still 5.0. It was all a scam. Li Siyi's bonus was wasted.