半导体设备上掉落的光罩

文摘   2024-10-29 07:05   河南  

李四一在一家半导体厂的光罩室做着管理光罩的工作。由于是逻辑芯片厂,用到的光罩会特别多,李四一几乎每天都能收到新的光罩。新的光罩来的时候是一个透明的盒子,也叫水晶盒,shipping box.但是这种水晶盒子是不同于厂里的黑色的光罩盒,李四一需要把这个盒子放到专门的开盒器上,然后用光罩夹持棒传到SMIF pod上面。

光罩室也有几台专门的reticle stocker用来存放光罩的,偶尔李四一也会用那个机台进行目检,看看光罩上有没有什么脏东西。

相比其他部门来说,李四一还是算比较轻松的了。这天上午李四一正在光罩室进行光罩目检工作,小手机便打过来了,是光刻部门打过来了,说是有片光罩在机台可能上面摔了,李四一一听,让他们先别动,需要拍个照,李四一把手头目检工作停了,把光罩放回盒子里面,拿上相机就走向了了光刻机区域。

一群人围着光刻机的屏幕,上面写着几个大字,reticle lost.不过也没人开机台看光罩,设备告诉李四一说厂商还没过来呢,我打电话再催一下。

大概等了半个小时,厂商便背着无尘包过来了,设备让厂商开始动工了。设备厂商熟练地在电脑上操作了一下,然后绕到后面开门,能看到reticle handler.厂商说确实摔了,成好几块。李四一拿着相机开始一顿拍照,得了印钞机母版碎了一块,几十万一块的光罩就这样没了,不过不是李四一的,是厂领导的,李四一也不心疼。李四一让厂商帮忙把pod从机台上解锁一下,他要调回去,看一看这块光罩是不是只剩一块了。

李四一看着光罩回去了,他也回去了。查询了一下,这块光罩是块独苗,李四一和领导反应了一下,领导也挺急的,反复问李四一真的碎了吗,李四一只好说,碎了碎了,502都粘不回来了,玻璃基板,pellicle 也破了。这一层Layer只好耽误一下了。

事后李四一看到他们写的报告光罩掉下来的原因是光刻机没把光罩吸住从高高的地方掉了下来,砸在了RH gripper上面,最后碎在了光刻机内部。

总有人做报告,李四一在会上听到了光刻机EE的老大被黄光区的一把手劈头盖脸地骂,李四一能看到他的唾沫星子在空中飞舞,都快掉在了李四一头上了,上班,挺难的。

不过,机台怎么可能不出问题呢?人偶尔也会生病。不然要那么多设备工程师干嘛。李四一以为没自己的事了,李四一却在会上也被提名了,说没有做好光罩检测工作,光罩如果太脏,或者上面有大颗粒,会洗不住。

李四一还好李四一早有准备,拿出光罩出光罩室前在光罩检测设备上的图片给他们看,他们又说光罩是干净的,可光罩盒呢?

李四一接着又拿出光罩盒的照片,他细心地把光罩盒用紫外光照着,光罩盒底部,cover,光罩support 部分,都挺干净的,李四一给他们看了POD ID ,李四一的部分就此结束。会议在下班的时候结束了。李四一这一天的班,算是结束了,李四一心想还好和我没关系,下班~


Li Siyi works in the mask room of a semiconductor factory, managing masks. Since it is a logic chip factory, a lot of masks are used, and Li Siyi receives new masks almost every day. The new mask comes in a transparent box, also called a crystal box, or shipping box. However, this crystal box is different from the black mask box in the factory. Li Siyi needs to put this box on a special box opener, and then use the mask clamping rod to transfer it to the SMIF pod. The mask room also has several special reticle stockers for storing masks, and occasionally Li Siyi will use that machine to perform a visual inspection to see if there is any dirt on the mask. Compared with other departments, Li Siyi's job is relatively easy. That morning, Li Siyi was doing visual inspection of the photomask in the photomask room when a call came from his cell phone. It was from the photolithography department, saying that a photomask might have fallen on the machine. Li Siyi asked them not to move and needed to take a picture. Li Siyi stopped the visual inspection, put the photomask back into the box, took the camera and walked to the photolithography area. A group of people surrounded the screen of the photolithography machine, which had a few big words written on it: reticle lost. But no one turned on the machine to check the photomask. The equipment told Li Siyi that the manufacturer had not come yet, so he called to urge them. After waiting for about half an hour, the manufacturer came with a dust-free bag, and the equipment asked the manufacturer to start the work. The equipment manufacturer skillfully operated the computer, then went around to the back to open the door and saw the reticle handler. The manufacturer said that it was indeed broken into several pieces. Li Siyi took the camera and started taking pictures. He found that a piece of the printing machine master was broken. The photomask that cost hundreds of thousands of yuan was gone. However, it was not Li Siyi's, but the factory leader's. Li Siyi didn't feel bad. Li Siyi asked the manufacturer to help unlock the pod from the machine. He wanted to adjust it back to see if there was only one piece of the photomask left. Li Siyi watched the photomask go back, and he went back too. After checking, this photomask was the only one left. Li Siyi reported it to the leader, who was also very anxious and repeatedly asked Li Siyi if it was really broken. Li Siyi just said that it was broken, and 502 couldn't be glued back. The glass substrate and pellicle were also broken. This layer had to be delayed. Afterwards, Li Siyi saw the report they wrote that the reason why the photomask fell off was that the photolithography machine did not suck the photomask and it fell from a high place, hit the RH gripper, and finally broke inside the photolithography machine. There are always people making reports. At the meeting, Li Siyi heard the head of the lithography machine EE being scolded by the head of the yellow light area. Li Siyi could see his spit flying in the air, almost falling on Li Siyi's head. It was hard to go to work. However, how could the machine not have problems? People get sick occasionally. Otherwise, why would we need so many equipment engineers? Li Siyi thought he had nothing to do, but Li Siyi was also named at the meeting, saying that the mask inspection work was not done well. If the mask is too dirty or there are large particles on it, it will not be washed. Fortunately, Li Siyi was prepared. He showed them the picture of the mask on the mask inspection equipment before it left the mask room. They said the mask was clean, but what about the mask box? Li Siyi then took out a photo of the mask box. He carefully shone the mask box with ultraviolet light. The bottom, cover, and mask support of the mask box were all clean. Li Siyi showed them the POD ID, and Li Siyi's part ended there. The meeting ended at the end of get off work. Li Siyi's work for the day was over. Li Siyi thought to himself, "Luckily it has nothing to do with me." He was off work.

Semi Dance
一个爱跳舞的半导体民工~
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