半导体厂的天车着火了

文摘 2024-10-13 08:59 陕西

李四一最近找了个半导体厂水电工的活，俗称厂务，负责厂里的大大小小的设施运转。说忙也忙，李四一经常接到厂里设备的电话问是不是真空掉了，CDA掉了，又或者是是不是断电了之类的问题。李四一也只好一一查看记录，看是否出现他们所说的突然断电断气的事件发生。

李四一准备进fab看一下，有个机台说是电压不稳定经常跳电。正当李四一通过风淋室，路过光刻区的时候，李四一感觉头顶一热，有灰屑垫下来，他抬头一看，头顶的天车冒着烟，带着火球在轨道上飞速运行，李四一以为自己做梦呢，掐了自己一下。

一台小车，两台小车，一辆辆小天车带着火球从李四一头顶掠过，李四一在fab里大喊，着火了，天车上的火焰经过的地方触发了烟雾报警器，烟雾报警器又把喷淋器给触发了，fab里面下起了小雨，李四一的无尘服也被淋湿了。

天花板上的天车依旧带着火球运转着，李四一赶紧打电话给管天车的，让他们把天车给停下来，天车部门说停不下来了，电脑软件没法搞，让李四一帮忙按下EMO.

李四一在天车部门的指导下按了天车的EMO，众天车总算停了下来。接着李四一又去把边上的灭火器取过来，对着顶上的天花板一喷，还好李四一带了安全眼镜，不然粉末就要进入李四一的眼睛了。喷完这一个，又喷下一个，李四一和厂里的人一块可算是把天车的火给扑灭了。

由于李四一在厂里的英勇挽留厂里财产行为，他被评为了这个月的fab之星，得到了厂长的嘉奖，以及一万块奖金。

后续的着火原因调查结果表明，天车质量不过关，线路发生短路，导致天车着火，天车连带着天车手里抓的光罩，硅片直接报废，很多机台由于喷淋器的触发，也进水了，复机也是需要一段时间的。天车更不要想了，这段时间，领导就让厂里的工艺设备，厂务之类的工人去手动抱Foup，手动放光罩了。

Li Siyi recently found a job as a plumber in a semiconductor factory, commonly known as factory affairs, responsible for the operation of large and small facilities in the factory. It is busy, Li Siyi often receives calls from the factory equipment asking if the vacuum is lost, the CDA is lost, or if there is a power outage. Li Siyi had no choice but to check the records one by one to see if the sudden power outage and gas outage they mentioned occurred. Li Siyi was going to go into the fab to take a look. There was a machine that said the voltage was unstable and often tripped. Just as Li Siyi passed the air shower room and passed the photolithography area, Li Siyi felt a heat on his head and dust fell. He looked up and saw the overhead crane was smoking and running fast on the track with a fireball. Li Siyi thought he was dreaming and pinched himself. One small car, two small cars, and one small overhead crane after another passed by Li Siyi's head with fireballs. Li Siyi shouted in the fab, "It's on fire." The place where the flames on the overhead crane passed triggered the smoke alarm, and the smoke alarm triggered the sprinkler. It started to rain in the fab, and Li Siyi's dust-free suit was also wet. The overhead crane on the ceiling was still running with a fireball. Li Siyi quickly called the crane manager and asked them to stop the crane. The crane department said it couldn't stop and the computer software couldn't be fixed, so they asked Li Siyi to help press EMO. Under the guidance of the crane department, Li Siyi pressed the EMO of the crane, and the cranes finally stopped. Then Li Siyi went to get the fire extinguisher next to him and sprayed it on the ceiling. Fortunately, Li Siyi wore safety glasses, otherwise the powder would have entered Li Siyi's eyes. After spraying this one, he sprayed the next one. Li Siyi and the people in the factory finally put out the fire on the crane. Because of Li Siyi's heroic act of saving the factory's property, he was named the Fab Star of the Month, and received the factory director's commendation and a bonus of 10,000 yuan. The subsequent investigation results of the cause of the fire showed that the quality of the overhead crane was not up to standard, and the circuit was short-circuited, causing the overhead crane to catch fire. The overhead crane and the photomask held by the overhead crane and the silicon wafers were directly scrapped. Many machines were also flooded due to the triggering of the sprinkler, and it would take some time to restore the machine. Forget about the overhead crane. During this period, the leaders asked the factory's process equipment and factory workers to manually hold the Foup and manually place the photomask.