半导体厂的炉管设备爆炸了

文摘 2025-01-10 08:04 陕西

本文纯属虚构，请勿当真！

李四一正在办公室坐着准备修改一下安全会议的PPT，用于礼拜三的安全会议上用。耳边响起了火警警报，这是哪里着火了，办公室里面的人还是反应挺快的，马上往楼梯那边跑，李四一看着fab里面的人也出来了一些人，穿着无尘服就直接出来了。

李四一一问，说是车间里面有台炉管设备炸了，还冒烟了呢！

李四一去到监控室，把画面切到了炉管设备那个区域，中间那台设备正冒着烟呢，李四一没看见明火。又把监控往边上的设备切了一下，周围的几个设备也亮起了红灯，ERT的人也已经进去了，李四一看着没有着火的迹象了，便也进去了。

李四一来到爆炸的设备旁边，一些机台的碎片安静地躺在了无尘室地板上，李四一问旁边的人，这台设备电源已经切了吧，切了，着周围的炉管设备都给切了，炸得还挺厉害的，立式炉直接给炸成卧倒的形态了，还压着别的机台。李四一看了一眼机台前面的设备担当铭牌，打了他们设备的电话，和他们说你们的设备炸了，赶紧进来看看，现在已经没有火了。

设备Loadport上面本来也有两个Foup的，一个炸到OHT的轨道上去了，另外一个Fouo前面盖板，和Foup的主体也已经分离，身首异处了。

设备不到10分钟就进来了，这样的场景设备说他也没见过，设备又打通了厂商的电话，说你们家的设备炸了，赶紧过来处理！

于是李四一和EE还有设备厂商，清洁工一起来清理起了地面，和其他设备周围，至于被炸的设备，估计是修不好了，得叫个搬运公司过来。拉去半导体厂旁边的废品回收站卖了！

第二天厂商叫了一家专业的半导体设备搬运公司，把炸倒的炉管设备给立了起来，然后搬出了fab，然后把剩下的炉管设备进行了维修，检查。

后续的事故分析中，设备厂商从炸毁的机台电脑硬盘里提取了机台log,发现爆炸前炉管的温度和气体流量有异常，温度在一直升高，没办法控制住了，结果炉管内的反应失控，压力急剧上升，最终引起了炉管爆炸。

厂里要求炉管半导体设备厂商检修一下全厂的炉管温控系统和报警系统，能否正常报警，并且赔偿厂里的损失，赔偿他们一台炉管设备，不然就等着收律师函了。

一检查，还有三台的温度传感器有问题，厂里督促他们赶紧把这给换了。由于这次爆炸还引发了小火，李四一作为安全部门人员，还得每周组织一次炉管爆炸引发火灾的演练，并且和厂里了的人再次培训fab火灾的安全知识。

This article is purely fictional, please do not take it seriously! Li Siyi was sitting in the office preparing to revise the PPT for the safety meeting for use at the safety meeting on Wednesday. A fire alarm rang in his ears. What was the fire? The people in the office reacted quickly and ran to the stairs immediately. Li Siyi saw some people coming out of the fab, wearing dust-free suits. Li Siyi asked one by one, and was told that a furnace tube equipment in the workshop had exploded and was smoking! Li Siyi went to the monitoring room and cut the screen to the area of the furnace tube equipment. The equipment in the middle was smoking, and Li Siyi did not see any open flames. He cut the monitoring to the equipment on the side, and several surrounding equipment also lit up red lights. The ERT people had already gone in. Li Siyi saw that there was no sign of fire, so he went in as well. Li Siyi came to the exploded equipment. Some machine fragments lay quietly on the clean room floor. Li Siyi asked the people next to him, "Has the power of this equipment been cut off?" It was cut off, and the furnace pipe equipment around it was also cut off. The explosion was quite severe. The vertical furnace was directly blown into a lying position, and it was also pressing other machines. Li Siyi took a look at the equipment nameplate in front of the machine, called their equipment number, and told them that your equipment exploded and they should come in to have a look. There is no fire now. There were originally two Foups on the equipment Loadport. One exploded onto the OHT track, and the front cover of the other Foup was separated from the main body of the Foup. The equipment came in less than 10 minutes. The equipment said that he had never seen such a scene. The equipment called the manufacturer again and said that your equipment exploded and they should come to deal with it quickly! So Li Siyi, EE, the equipment manufacturer, and the cleaners came together to clean up the ground and the surroundings of other equipment. As for the exploded equipment, it was estimated that it could not be repaired, so a moving company had to be called. They took it to the scrap recycling station next to the semiconductor factory and sold it! The next day, the manufacturer called a professional semiconductor equipment handling company to stand up the blown-down furnace tube equipment, then moved it out of the fab, and then repaired and inspected the remaining furnace tube equipment. In the subsequent accident analysis, the equipment manufacturer extracted the machine log from the computer hard disk of the blown-up machine and found that the temperature and gas flow of the furnace tube were abnormal before the explosion. The temperature was rising and could not be controlled. As a result, the reaction in the furnace tube was out of control, and the pressure rose sharply, eventually causing the furnace tube to explode. The factory required the furnace tube semiconductor equipment manufacturer to inspect the furnace tube temperature control system and alarm system of the entire factory to see if they could alarm normally, and compensate the factory for the loss and compensate them for one furnace tube equipment, otherwise they would be waiting to receive a lawyer's letter. Upon inspection, three other temperature sensors had problems, and the factory urged them to replace them quickly. Since the explosion also caused a small fire, Li Siyi, as a member of the safety department, had to organize a drill on furnace tube explosion-caused fires every week, and re-train the factory staff on fab fire safety knowledge.