半导体厂爆炸的RTP设备

文摘 2024-10-22 07:55 河南

最近两天，李四一又被安排做ERT的了，（即Emergency Response Team（应急反应小组）或紧急情况响应小组。这个小组的主要任务是在紧急情况下迅速行动，比如面对火灾、有毒气体泄漏或原油泄漏等突发状况时，他们能立即按照预先制定的紧急应对程序进行处理，从而最大限度地减少险情对人员和设施的威胁。）

即便不用进fab修机，也得在fab待满3个小时，李四一打算吃完午饭就进去，散散步，消消食，fab很大，李四一从东边走到西边便得花个半小时，午饭过后fab里面的人相对少了，不过也有一些不吃午饭继续在修机台的设备工程师，还好今天不用值班，自己管的那几台机台又跑得飞起，没空当机。

午饭间隙，厂里广播又放起了流行音乐鼓舞全厂上下的士气，而李四一悠闲地散着步，绕着fab通道走着，打算把这ERT的三个小时散完。

李四一经过退火RTP设备区域的时候，突然听见一台设备一声巨响Boom,李四一整个人吓一跳，一看旁边的其中两台RTP设备已经冒烟了，李四一闻到一股烧焦的味道，李四一连忙把那两台机台的EMO拍了下去，还好没有火苗，只是冒烟。李四一赶紧打电话给厂里安环说有设备炸了，让他们进来看看。李四一又打通了RTP设备负责人的电话，让他们一块过来。李四一摸了一下设备外壳，还挺烫的。李四一也是第一次见到设备炸了的，等着设备担当和安环过来的间隙，李四一取了一些三角锥和红白相间的杆子过来，把这两台设备围了起来。

李四一向他们讲述了事发经过，他们也一起看了监控，确认李四一的清白，两台设备几乎在同一时间发生爆炸的。李四一看了一眼设备内部，炸得不成样子了，这两台机台不大换血，怕是很难复机了。

他们把厂商叫了过来，看看厂商怎么说的。RTP设备厂商让他们把一台没爆炸的机台停机了看看，打开PCW drain水的地方一看，全是脏东西便说这是你们PCW太脏了吧，导致管路腐蚀漏水了，厂务便说怎么可能，是你们设备内部管路材料不好吧！

厂商让他们看看进机台前的一段管路filter,全黑的。厂务便说，这也说明不了什么，其他机台怎么没爆炸。

厂商便问设备，这两台你们前几天是不是做完PM了，设备点点头，PM项目里有清理管道内容的，我怀疑是不是在疏通管道的时候把灯丝那一段的冷却管给捅破了，你看现在机台已经冷却了，这两台还是能看到一些水的。RTP工作温度一千多度，一漏水直接气化，气化便直接爆炸了。

厂商说的有道理，不过机台还没过保修期，这个还是你们厂商得帮忙修一下，厂商便说要报保险这个，修肯定是我们修，费用嘛，得和领导开会去掰扯。

李四一问，是不是没我事了，我要去食堂打饭了，李四一一看时间快到饭点了，眼见没自己事情了，连忙往外走了。

RTP设备的工作原理基于快速退火技术，主要用于‌半导体制造过程中。‌ RTP设备通过高功率的电热元件，如加热电阻，产生高温，通常在400~1300℃的温度范围内操作。与传统的炉管退火相比，RTP具有以下特点：

‌热预算少‌：由于加热和冷却过程非常快，减少了硅中杂质的运动和玷污。
‌加工时间短‌：大大缩短了加工周期。
‌精确的温度控制‌：RTP采用‌加热灯管，通过快速升温降温来实现精确的温度控制。

RTP设备的工作过程

RTP设备的工作过程包括以下几个步骤：

‌加热过程‌：通过高功率电热元件迅速将硅片加热到设定温度。
‌保温‌：在高温下保持一段时间，以确保硅片均匀受热。
‌冷却‌：迅速降温，以保持硅片的纯净度和减少杂质运动。

RTP设备的应用场景

RTP设备广泛应用于半导体制造过程中，特别是在‌离子注入后退火工艺中。通过快速退火，可以恢复晶体的结构，消除缺陷，激活施主和受主杂质，从而提高半导体的电学性能和设备的可靠性。

In the past two days, Li Siyi was assigned to do ERT again (Emergency Response Team or Emergency Response Team. The main task of this team is to act quickly in emergency situations. For example, when faced with emergencies such as fire, toxic gas leakage or crude oil leakage, they can immediately deal with it according to the pre-established emergency response procedures, thereby minimizing the threat of dangerous situations to personnel and facilities.) Even if he does not need to go into the fab to repair the machine, he still has to stay in the fab for 3 hours. Li Siyi plans to go in after lunch, take a walk, and digest his food. The fab is very large, and it takes Li Siyi half an hour to walk from the east to the west. After lunch, there are relatively fewer people in the fab, but there are also some equipment engineers who continue to repair the machines without lunch. Fortunately, they don’t have to be on duty today, and the machines they are in charge of are running fast, so there is no time for them to crash. During the lunch break, the factory radio played pop music again to boost the morale of the whole factory, and Li Siyi took a leisurely walk around the fab channel, intending to spend the three hours of ERT. When Li Siyi passed by the annealing RTP equipment area, he suddenly heard a loud bang from a device. Li Siyi was startled. He saw that two of the RTP devices next to him were already smoking. Li Siyi smelled a burning smell. Li Siyi quickly took down the EMO of the two machines. Fortunately, there was no flame, just smoke. Li Siyi quickly called the factory's safety and environmental protection department to say that a device had exploded and asked them to come in and take a look. Li Siyi also called the person in charge of the RTP equipment and asked them to come together. Li Siyi touched the outer shell of the equipment and it was still quite hot. It was also the first time that Li Siyi saw a device explode. While waiting for the equipment person in charge and safety and environmental protection to come over, Li Siyi took some triangular cones and red and white poles and surrounded the two devices. Li Siyi told them what happened. They also watched the surveillance together and confirmed Li Siyi's innocence. The two devices exploded almost at the same time. Li Siyi took a look at the inside of the equipment. It was blown to pieces. If the two machines were not replaced, it would be difficult to restore them. They called the manufacturer to see what the manufacturer said. The RTP equipment manufacturer asked them to shut down a machine that did not explode. When they opened the PCW drain, they saw that it was full of dirt. They said that it was because your PCW was too dirty, which caused the pipeline to corrode and leak. The factory staff said how could it be possible, it was because the internal pipeline material of your equipment was not good! The manufacturer asked them to look at the filter of a section of the pipeline before entering the machine, which was completely black. The factory staff said that this did not mean anything, why didn't the other machines explode. The manufacturer asked the equipment if you had done PM for these two machines a few days ago. The equipment nodded and said that there was a content of cleaning the pipeline in the PM project. I suspect that the cooling pipe of the filament section was punctured when the pipeline was unblocked. You see, the machine has cooled down now, but you can still see some water in these two machines. The working temperature of RTP is more than 1,000 degrees. Once it leaks, it will be directly vaporized, and the vaporization will directly explode. The manufacturer's words made sense, but the machine was not out of warranty yet, so the manufacturer had to help repair it. The manufacturer said that they would have to claim insurance, so they would definitely repair it, and they would have to discuss the cost with the leader in a meeting. Li Siyi asked if there was nothing for me to do, and I had to go to the cafeteria to get food. Li Siyi saw that it was almost time for lunch, and seeing that there was nothing for him to do, he hurried out.